Inventor · disambiguated record

Yosias Melaku

Also filed as: MELAKU YOSIAS

3 granted patents·91 citations·filing 1999–2001

74Inventor score

Technology areasH10P

Files withLAM RES CORP3

Top patents by PatentIndex Score

3 records

0178US6316169B1Methods for reducing profile variation in photoresist trimmingLAM RES CORP·Filed 1999·Granted Nov 13, 2001·51 cites·19 claims
0266US6432832B1Method of improving the profile angle between narrow and wide featuresLAM RES CORP·Filed 1999·Granted Aug 13, 2002·35 cites·35 claims
0356US6653058B2Methods for reducing profile variation in photoresist trimmingLAM RES CORP·Filed 2001·Granted Nov 25, 2003·5 cites·21 claims

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