Inventor · disambiguated record
Chaitanya A. Prasad
Also filed as: PRASAD CHAITANYA A · PRASAD CHAITANYA ANJANEYALU
10 granted patents·6 pending applications·15 citations·filing 2015–2024
82Inventor score
Technology areasH10P
Files withAPPLIED MATERIALS INC16
Top patents by PatentIndex Score
16 records- 0193US11562915B2Methods, systems, and apparatus for optically monitoring individual lampsAPPLIED MATERIALS INC·Filed 2022·Granted Jan 24, 2023·3 cites·20 claims
- 0292US10626500B2Showerhead designAPPLIED MATERIALS INC·Filed 2019·Granted Apr 21, 2020·7 cites·20 claims
- 0382US10221483B2Showerhead designAPPLIED MATERIALS INC·Filed 2015·Granted Mar 5, 2019·3 cites·11 claims
- 0481US11515130B2Fast response pedestal assembly for selective precleanAPPLIED MATERIALS INC·Filed 2018·Granted Nov 29, 2022·2 cites·20 claims
- 0577US2024282556A1Fast response pedestal assembly for selective precleanAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0676US11990321B2Fast response pedestal assembly for selective precleanAPPLIED MATERIALS INC·Filed 2022·Granted May 21, 2024·0 cites·20 claims
- 0775US12341032B2Methods of selective oxidation on rapid thermal processing (RTP) chamber with active steam generationAPPLIED MATERIALS INC·Filed 2024·Granted Jun 24, 2025·0 cites·13 claims
- 0863US11996305B2Selective oxidation on rapid thermal processing (RTP) chamber with active steam generationAPPLIED MATERIALS INC·Filed 2021·Granted May 28, 2024·0 cites·18 claims
- 0954US2023133402A1Injection module for a process chamberAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 1054US2025161858A1Inline filtration for steam applicationsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1147US12165907B2Apparatus for rotating substratesAPPLIED MATERIALS INC·Filed 2020·Granted Dec 10, 2024·0 cites·21 claims
- 1242US11615944B2Remote plasma oxidation chamberAPPLIED MATERIALS INC·Filed 2018·Granted Mar 28, 2023·0 cites·20 claims
- 1342US11004704B2Finned rotor coverAPPLIED MATERIALS INC·Filed 2018·Granted May 11, 2021·0 cites·16 claims
- 1438US2021249284A1Fast response dual-zone pedestal assembly for selective precleanAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 1537US2018254206A1Rotor coverAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
- 1632US2022262657A1Pedestal with multi-zone heatingAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
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