Inventor · disambiguated record
Suguru Sakugawa
Also filed as: SAKUGAWA SUGURU
7 granted patents·3 pending applications·8 citations·filing 2014–2019
74Inventor score
Files withEBARA CORP10
Top patents by PatentIndex Score
10 records- 0182US9662761B2Polishing apparatusEBARA CORP·Filed 2014·Granted May 30, 2017·4 cites·24 claims
- 0280US9370852B2Pressure regulator and polishing apparatus having the pressure regulatorEBARA CORP·Filed 2015·Granted Jun 21, 2016·2 cites·6 claims
- 0377US10792784B2Leak checking method, and computer-readable storage medium for performing the leak checking methodEBARA CORP·Filed 2018·Granted Oct 6, 2020·2 cites·5 claims
- 0463US11642753B2Polishing-pad laminated structure, polishing-pad positioning instrument, and method of attaching a polishing pad to a polishing tableEBARA CORP·Filed 2019·Granted May 9, 2023·0 cites·11 claims
- 0547US2020269383A1Substrate polishing device and substrate polishing methodEBARA CORP·Filed 2018·Application pending·0 cites
- 0639US10556314B2Head height adjustment device and substrate processing apparatus provided with head height adjustment deviceEBARA CORP·Filed 2017·Granted Feb 11, 2020·0 cites·15 claims
- 0739US9922852B2Pressure calibration jig and substrate processing apparatusEBARA CORP·Filed 2015·Granted Mar 20, 2018·0 cites·20 claims
- 0839US2018236630A1Substrate polisher and polishing methodEBARA CORP·Filed 2018·Application pending·0 cites
- 0938US11221239B2Substrate processing apparatus and method of detecting indentation formed in substrateEBARA CORP·Filed 2018·Granted Jan 11, 2022·0 cites·18 claims
- 1036US2017352573A1Substrate processing apparatusEBARA CORP·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →