Inventor · disambiguated record
Koji Uda
Also filed as: UDA KOJI
17 granted patents·727 citations·filing 1985–1995
96Inventor score
Files withCANON KK17
Top patents by PatentIndex Score
17 records- 0193US5063582ALiquid cooled x-ray lithographic exposure apparatusCANON KK·Filed 1991·Granted Nov 5, 1991·91 cites·17 claims
- 0292US5182615AExposure apparatusCANON KK·Filed 1990·Granted Jan 26, 1993·79 cites·12 claims
- 0391US5577552ATemperature controlling device for mask and wafer holdersCANON KK·Filed 1995·Granted Nov 26, 1996·95 cites·4 claims
- 0491US5231291AWafer table and exposure apparatus with the sameCANON KK·Filed 1992·Granted Jul 27, 1993·149 cites·16 claims
- 0586US5157700AExposure apparatus for controlling intensity of exposure radiationCANON KK·Filed 1989·Granted Oct 20, 1992·41 cites·47 claims
- 0683US5138643AExposure apparatusCANON KK·Filed 1990·Granted Aug 11, 1992·42 cites·9 claims
- 0781US5172402AExposure apparatusCANON KK·Filed 1991·Granted Dec 15, 1992·33 cites·18 claims
- 0881US5028797AAn alignment system for align first and second objects using alignment marksCANON KK·Filed 1989·Granted Jul 2, 1991·30 cites·14 claims
- 0977US5377251AExposure apparatusCANON KK·Filed 1994·Granted Dec 27, 1994·26 cites·8 claims
- 1076US5610965AExposure methodCANON KK·Filed 1994·Granted Mar 11, 1997·29 cites·15 claims
- 1171US4669867AAlignment and exposure apparatusCANON KK·Filed 1985·Granted Jun 2, 1987·22 cites·10 claims
- 1268US5008703AExposure apparatus and control of the sameCANON KK·Filed 1989·Granted Apr 16, 1991·18 cites·9 claims
- 1367US5112133AAlignment systemCANON KK·Filed 1991·Granted May 12, 1992·42 cites·11 claims
- 1454US5001734ASOR exposure systemCANON KK·Filed 1989·Granted Mar 19, 1991·10 cites·10 claims
- 1547US5226523AConveying apparatus and method of controlling the sameCANON KK·Filed 1992·Granted Jul 13, 1993·8 cites·10 claims
- 1638US5641264ASubstrate conveying device and method of controlling the sameCANON KK·Filed 1992·Granted Jun 24, 1997·9 cites·11 claims
- 1731US5459573ALight quantity controlling apparatusCANON KK·Filed 1994·Granted Oct 17, 1995·3 cites·25 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →