Inventor · disambiguated record
Tomonori Umezaki
Also filed as: UMEZAKI TOMONORI
11 granted patents·6 pending applications·15 citations·filing 2011–2022
82Inventor score
Top patents by PatentIndex Score
17 records- 0188US9017571B2Dry etching agent and dry etching methodUMEZAKI TOMONORI·Filed 2011·Granted Apr 28, 2015·12 cites·20 claims
- 0268US12325934B2Single-crystal silicon carbide wafer, and single-crystal silicon carbide ingotCENTRAL GLASS CO LTD·Filed 2022·Granted Jun 10, 2025·0 cites·20 claims
- 0364US12325935B2Single-crystal silicon carbide wafer, single-crystal silicon carbide ingot, and method for producing single-crystal silicon carbideCENTRAL GLASS CO LTD·Filed 2022·Granted Jun 10, 2025·0 cites·20 claims
- 0463US9852914B2Sacrificial-film removal method and substrate processing deviceSCREEN HOLDINGS CO LTD·Filed 2014·Granted Dec 26, 2017·1 cites·4 claims
- 0562US9082725B2Pattern forming methodKIMURA MASAHIRO·Filed 2012·Granted Jul 14, 2015·1 cites·8 claims
- 0660US9165776B2Dry etching methodUMEZAKI TOMONORI·Filed 2012·Granted Oct 20, 2015·1 cites·7 claims
- 0755US9230821B2Dry etching agent and dry etching method using the sameCENTRAL GLASS CO LTD·Filed 2014·Granted Jan 5, 2016·0 cites·11 claims
- 0854US2016002574A1Cleaning Gas and Cleaning MethodCENTRAL GLASS CO LTD·Filed 2014·Application pending·0 cites
- 0950US2015047680A1Method for Dry-Cleaning Metal Film in Film-Formation ApparatusCENTRAL GLASS CO LTD·Filed 2013·Application pending·0 cites
- 1046US11643748B2Silicon carbide single crystalCENTRAL GLASS CO LTD·Filed 2018·Granted May 9, 2023·0 cites·8 claims
- 1145US9093388B2Dry etching agent and dry etching method using the sameHIBINO YASUO·Filed 2011·Granted Jul 28, 2015·0 cites·7 claims
- 1244US8562751B2Dry cleaning method of substrate processing apparatusGUNJI ISAO·Filed 2012·Granted Oct 22, 2013·0 cites·19 claims
- 1344US2013333729A1Dry Cleaning MethodUMEZAKI TOMONORI·Filed 2012·Application pending·0 cites
- 1444US2013032600A1Valve For Container Filled With Halogen Gas Or Halogen Compound GasCENTRAL GLASS CO LTD·Filed 2011·Application pending·0 cites
- 1540US2013221024A1Halogen-containing gas supply apparatus and halogen-containing gas supply methodYAO AKIFUMI·Filed 2011·Application pending·0 cites
- 1636US10151046B2Method for producing crystal of silicon carbide, and crystal production deviceUNIV NAGOYA NAT UNIV CORP·Filed 2015·Granted Dec 11, 2018·0 cites·9 claims
- 1734US2014302683A1Dry etching agentKIKUCHI AKIOU·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →