Inventor · disambiguated record

Richard Buttinger

Also filed as: BUTTINGER RICHARD

2 granted patents·12 citations·filing 2001–2002

53Inventor score

Technology areasG03F H10P

Files withEHRKE HANS-ULRICH1 SUESS MICRO TEC LITHOGRAPHY GM1

Top patents by PatentIndex Score

2 records

0154US7168607B2Method and device for cleaning and then bonding substratesEHRKE HANS-ULRICH·Filed 2001·Granted Jan 30, 2007·11 cites·21 claims
0229US6891602B2Device for aligning masks in photolithographySUESS MICRO TEC LITHOGRAPHY GM·Filed 2002·Granted May 10, 2005·1 cites·13 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →