Inventor · disambiguated record
Akiteru Koh
Also filed as: KOH AKITERU
4 granted patents·1 pending application·16 citations·filing 2002–2004
67Inventor score
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
5 records- 0168US7473377B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2004·Granted Jan 6, 2009·14 cites·66 claims
- 0244US7179752B2Dry etching methodTOKYO ELECTRON LTD·Filed 2002·Granted Feb 20, 2007·1 cites·10 claims
- 0340US7183217B2Dry-etching methodTOKYO ELECTRON LTD·Filed 2002·Granted Feb 27, 2007·1 cites·7 claims
- 0433US7192532B2Dry etching methodTOKYO ELECTRON LTD·Filed 2002·Granted Mar 20, 2007·0 cites·11 claims
- 0530US2004009667A1Etching methodFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →