Inventor · disambiguated record
Vincent J. Carlos
Also filed as: CARLOS VINCENT J
3 granted patents·22 citations·filing 2002–2004
69Inventor score
Files withIBM3
Top patents by PatentIndex Score
3 records- 0167US6944578B2Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focusIBM·Filed 2004·Granted Sep 13, 2005·9 cites·6 claims
- 0265US6917901B2Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focusIBM·Filed 2002·Granted Jul 12, 2005·8 cites·26 claims
- 0350US7060626B2Multi-run selective pattern and etch wafer processIBM·Filed 2003·Granted Jun 13, 2006·5 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →