Inventor · disambiguated record
Peter Helmus
Also filed as: HELMUS PETER · HELMUS PETER RICHARD
3 granted patents·1 pending application·7 citations·filing 2011–2020
60Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0176US12111581B2Method to manufacture nano ridges in hard ceramic coatingsASML HOLDING NV·Filed 2019·Granted Oct 8, 2024·2 cites·18 claims
- 0272US8902562B2Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clampHELMUS PETER RICHARD·Filed 2012·Granted Dec 2, 2014·4 cites·20 claims
- 0355US9348236B2Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clampHELMUS PETER RICHARD·Filed 2011·Granted May 24, 2016·1 cites·22 claims
- 0436US2022134480A1Laser roughening: engineering the roughness of the burl topASML HOLDING NV·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →