Inventor · disambiguated record
Takuro Ushida
Also filed as: USHIDA TAKURO
4 granted patents·1 pending application·11 citations·filing 2014–2022
68Inventor score
Top patents by PatentIndex Score
5 records- 0195US11261528B2Substrate processing apparatus and method of manufacturing semiconductor deviceKOKUSAI ELECTRIC CORP·Filed 2020·Granted Mar 1, 2022·5 cites·5 claims
- 0283US9916976B2Method of manufacturing semiconductor device, substrate processing apparatus, and recording mediumHITACHI INT ELECTRIC INC·Filed 2016·Granted Mar 13, 2018·4 cites·12 claims
- 0370US9953830B2Method of manufacturing semiconductor device, substrate processing apparatus and recording mediumHITACHI INT ELECTRIC INC·Filed 2014·Granted Apr 24, 2018·2 cites·12 claims
- 0463US11967501B2Substrate processing apparatus and method of manufacturing semiconductor deviceKOKUSAI ELECTRIC CORP·Filed 2022·Granted Apr 23, 2024·0 cites·20 claims
- 0552US2022298628A1Nozzle Cleaning Method, Substrate Processing Method, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording MediumKOKUSAI ELECTRIC CORP·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →