Inventor · disambiguated record
Tetsushi Ozaki
Also filed as: OZAKI TETSUSHI
4 granted patents·2 pending applications·11 citations·filing 2005–2016
69Inventor score
Top patents by PatentIndex Score
6 records- 0176US10133265B2Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trendsTOKYO ELECTRON LTD·Filed 2016·Granted Nov 20, 2018·2 cites·20 claims
- 0273US7615163B2Film formation apparatus and method of using the sameTOKYO ELECTRON LTD·Filed 2005·Granted Nov 10, 2009·5 cites·15 claims
- 0369US9405289B2Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trendsTOKYO ELECTRON LTD·Filed 2012·Granted Aug 2, 2016·2 cites·20 claims
- 0459US8129775B2Semiconductor device and method of manufacturing the sameAKIYAMA KOJI·Filed 2009·Granted Mar 6, 2012·2 cites·11 claims
- 0531US2015275359A1Substrate Processing ApparatusTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
- 0630US2015243492A1Apparatus and method of forming silicon nitride filmTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Tetsushi Ozaki files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →