Inventor · disambiguated record
Shigeo Koya
Also filed as: KOYA SHIGEO
5 granted patents·5 pending applications·3 citations·filing 2012–2025
66Inventor score
Top patents by PatentIndex Score
10 records- 0171US10509335B2Cover member, conveying apparatus, lithography apparatus, and method of manufacturing articleCANON KK·Filed 2018·Granted Dec 17, 2019·1 cites·21 claims
- 0259US9104108B2Holder, lithography apparatus, and method of manufacturing articleCANON KK·Filed 2014·Granted Aug 11, 2015·1 cites·10 claims
- 0359US2024290650A1Stage apparatus, lithography apparatus, and article manufacturing methodCANON KK·Filed 2024·Application pending·0 cites
- 0458US2025093788A1Substrate holding apparatus, substrate processing apparatus, separation method, and article manufacturing methodCANON KK·Filed 2024·Application pending·0 cites
- 0552US12469737B2Stage apparatus, lithography apparatus and article manufacturing methodCANON KK·Filed 2022·Granted Nov 11, 2025·0 cites·14 claims
- 0652US10185233B2Cover member, conveying apparatus, lithography apparatus, and method of manufacturing articleCANON KK·Filed 2017·Granted Jan 22, 2019·0 cites·12 claims
- 0751US8766215B2Charged particle beam drawing apparatus and method of manufacturing articleKOYA SHIGEO·Filed 2012·Granted Jul 1, 2014·1 cites·12 claims
- 0848US2025279312A1Holding apparatus, substrate processing apparatus and article manufacturing methodCANON KK·Filed 2025·Application pending·0 cites
- 0945US2025269480A1Substrate holding apparatus, substrate processing apparatus, substrate holding method, substrate processing method, and article manufacturing methodCANON KK·Filed 2025·Application pending·0 cites
- 1028US2013149647A1Holding apparatus, drawing apparatus, and method of manufacturing articleCANON KK·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →