Inventor · disambiguated record
Shufeng Bai
Also filed as: BAI SHUFENG
5 granted patents·17 citations·filing 2003–2018
73Inventor score
Top patents by PatentIndex Score
5 records- 0186US9494874B2Method and apparatus for design of a metrology targetASML NETHERLANDS BV·Filed 2014·Granted Nov 15, 2016·5 cites·18 claims
- 0274US10296681B2Process based metrology target designASML NETHERLANDS BV·Filed 2018·Granted May 21, 2019·1 cites·23 claims
- 0373US10007744B2Process based metrology target designASML NETHERLANDS BV·Filed 2015·Granted Jun 26, 2018·2 cites·20 claims
- 0468US7317739B2Mode-locked laser using a mode-locking wavelength selective reflectorUNIV PRINCETON·Filed 2003·Granted Jan 8, 2008·9 cites·14 claims
- 0532US8192669B2Methods for fabricating large area nanoimprint moldsCHOU STEPHEN Y·Filed 2009·Granted Jun 5, 2012·0 cites·26 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →