Inventor · disambiguated record
Kazunori Furukawahara
Also filed as: FURUKAWAHARA KAZUNORI
3 granted patents·2 pending applications·1,036 citations·filing 2006–2016
79Inventor score
Top patents by PatentIndex Score
5 records- 0197US7833353B2Liquid material vaporization apparatus for semiconductor processing apparatusASM JAPAN·Filed 2007·Granted Nov 16, 2010·562 cites·19 claims
- 0296US9349620B2Apparatus and method for pre-baking substrate upstream of process chamberASM IP HOLDING BV·Filed 2014·Granted May 24, 2016·472 cites·20 claims
- 0345US7712370B2Method of detecting occurrence of sticking of substrateASM JAPAN·Filed 2006·Granted May 11, 2010·2 cites·26 claims
- 0443US2010006025A1Exhaust gas trap for semiconductor processesASM JAPAN·Filed 2008·Application pending·0 cites
- 0532US2017309457A1Substrate processing apparatusASM IP HOLDING BV·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →