Inventor · disambiguated record
Mitsuhiro Kamei
Also filed as: KAMEI MITSUHIRO
10 granted patents·2 pending applications·267 citations·filing 1988–2010
91Inventor score
Top patents by PatentIndex Score
12 records- 0192US5116482AFilm forming system using high frequency power and power supply unit for the sameHITACHI LTD·Filed 1990·Granted May 26, 1992·88 cites·6 claims
- 0287US4865709AMagnetron sputter apparatus and method for forming films by using the same apparatusHITACHI LTD·Filed 1988·Granted Sep 12, 1989·38 cites·17 claims
- 0369US5085755ASputtering apparatus for forming thin filmsHITACHI LTD·Filed 1989·Granted Feb 4, 1992·16 cites·7 claims
- 0465US5429729ASputtering apparatus, device for exchanging target and method for the sameHITACHI LTD·Filed 1990·Granted Jul 4, 1995·25 cites·11 claims
- 0565US4986890AThin film deposition systemHITACHI LTD·Filed 1990·Granted Jan 22, 1991·40 cites·17 claims
- 0663US5999236AActive-matrix liquid crystal display unit in which gate and/or data lines are made of Cr containing Ne-atomsHITACHI LTD·Filed 1997·Granted Dec 7, 1999·24 cites·16 claims
- 0753US4911815ASputtering apparatus for production of thin films of magnetic materialsHITACHI LTD·Filed 1988·Granted Mar 27, 1990·16 cites·3 claims
- 0851US2011019200A1Apparatus for visual inspectionHITACHI HIGH TECH CORP·Filed 2010·Application pending·0 cites
- 0949US7821644B2Apparatus for visual inspectionHITACHI HIGH TECH CORP·Filed 2005·Granted Oct 26, 2010·0 cites·9 claims
- 1049US5783055AMulti-chamber sputtering apparatusHITACHI LTD·Filed 1996·Granted Jul 21, 1998·17 cites·4 claims
- 1138US2002014402A1Sputtering system, sputtering support system and sputtering control methodFiled 2001·Application pending·0 cites
- 1229US5376777AControl apparatus and method for a substrate tray on an in-line sputtering apparatusHITACHI LTD·Filed 1991·Granted Dec 27, 1994·3 cites·10 claims
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