Inventor · disambiguated record
Tetsuya Igo
Also filed as: IGO TETSUYA
7 granted patents·38 citations·filing 2009–2013
81Inventor score
Files withNISSIN ION EQUIPMENT CO LTD3FUJITA HIDEKI1IGO TETSUYA1IKEJIRI TADASHI1YAMASHITA TAKATOSHI1
Top patents by PatentIndex Score
7 records- 0184US8702920B2Repeller structure and ion sourceIKEJIRI TADASHI·Filed 2010·Granted Apr 22, 2014·12 cites·5 claims
- 0281US9142386B2Ion beam lineNISSIN ION EQUIPMENT CO LTD·Filed 2013·Granted Sep 22, 2015·5 cites·44 claims
- 0380US8253114B2Ion sourceYAMASHITA TAKATOSHI·Filed 2009·Granted Aug 28, 2012·9 cites·14 claims
- 0479US8389964B2Ion implanting apparatus and deflecting electrodeIGO TETSUYA·Filed 2009·Granted Mar 5, 2013·8 cites·4 claims
- 0569US8664861B1Plasma generatorNISSIN ION EQUIPMENT CO LTD·Filed 2013·Granted Mar 4, 2014·2 cites·3 claims
- 0668US7772573B2Ion implanting apparatus and method of correcting beam orbitNISSIN ION EQUIPMENT CO LTD·Filed 2009·Granted Aug 10, 2010·2 cites·8 claims
- 0739US8569955B2Plasma generatorFUJITA HIDEKI·Filed 2011·Granted Oct 29, 2013·0 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →