Inventor · disambiguated record
Marco Matheus Louis Steeghs
Also filed as: STEEGHS MARCO MATHEUS LOUIS
3 granted patents·2 pending applications·2 citations·filing 2011–2025
50Inventor score
Top patents by PatentIndex Score
5 records- 0172US10845706B2Mirror arrayASML NETHERLANDS BV·Filed 2018·Granted Nov 24, 2020·2 cites·21 claims
- 0260US2025320113A1Plasma shielding for an electrostatic mems deviceASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0356US2025199294A1Method to adjust an illumination beam path within an illumination optics and illumination optics having an adjustment systemZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0447US12411415B2Lithographic apparatus and method for illumination uniformity correctionASML NETHERLANDS BV·Filed 2022·Granted Sep 9, 2025·0 cites·13 claims
- 0527US8699000B2Illumination system for a lithographic apparatusWINKLER STEFFEN·Filed 2011·Granted Apr 15, 2014·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →