Inventor · disambiguated record
Mitsutoshi Shuto
Also filed as: SHUTO MITSUTOSHI
3 granted patents·4 pending applications·87 citations·filing 1991–2008
71Inventor score
Files withASM JAPAN7
Top patents by PatentIndex Score
7 records- 0182US5192371ASubstrate supporting apparatus for a CVD apparatusASM JAPAN·Filed 1991·Granted Mar 9, 1993·76 cites·3 claims
- 0280US8021723B2Method of plasma treatment using amplitude-modulated RF powerASM JAPAN·Filed 2007·Granted Sep 20, 2011·7 cites·24 claims
- 0375US7514934B2DC bias voltage measurement circuit and plasma CVD apparatus comprising the sameASM JAPAN·Filed 2005·Granted Apr 7, 2009·4 cites·24 claims
- 0451US2007266945A1Plasma cvd apparatus equipped with plasma blocking insulation plateASM JAPAN·Filed 2007·Application pending·0 cites
- 0543US2005037626A1Semiconductor substrate supporting apparatusASM JAPAN·Filed 2004·Application pending·0 cites
- 0641US2009056627A1Method and apparatus for monitoring plasma-induced damage using dc floating potential of substrateASM JAPAN·Filed 2007·Application pending·0 cites
- 0737US2010085129A1Impedance matching apparatus for plasma-enhanced reaction reactorASM JAPAN·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →