Inventor · disambiguated record
Reed A. Blackburn
Also filed as: BLACKBURN REED A
3 granted patents·1 pending application·61 citations·filing 1997–2005
72Inventor score
Technology areasH10P
Files withSEMITOOL INC3
Top patents by PatentIndex Score
4 records- 0182US6854473B2Method and apparatus for executing plural processes on a microelectronic workpiece at a single processing stationSEMITOOL INC·Filed 2001·Granted Feb 15, 2005·29 cites·47 claims
- 0261US6090711AMethods for controlling semiconductor workpiece surface exposure to processing liquidsSEMITOOL INC·Filed 1997·Granted Jul 18, 2000·29 cites·23 claims
- 0344US2005121313A1Method and apparatus for executing plural processes on a microelectronic workpiece at a single processing stationFiled 2005·Application pending·0 cites
- 0430US6602383B1Apparatus and methods for controlling workpiece surface exposure to processing liquids during the fabrication of microelectronic componentsSEMITOOL INC·Filed 1999·Granted Aug 5, 2003·3 cites·14 claims
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