Inventor · disambiguated record
Eric Panning
Also filed as: PANNING ERIC · PANNING ERIC M
8 granted patents·2 pending applications·23 citations·filing 2002–2025
82Inventor score
Top patents by PatentIndex Score
10 records- 0175US7208747B2Adjustment of distance between source plasma and mirrors to change partial coherenceINTEL CORP·Filed 2006·Granted Apr 24, 2007·3 cites·11 claims
- 0269US7527920B2Active hardmask for lithographic patterningINTEL CORP·Filed 2005·Granted May 5, 2009·2 cites·12 claims
- 0369US7098466B2Adjustable illumination sourceINTEL CORP·Filed 2004·Granted Aug 29, 2006·8 cites·20 claims
- 0455US7033739B2Active hardmask for lithographic patterningINTEL CORP·Filed 2003·Granted Apr 25, 2006·3 cites·9 claims
- 0554US8865376B2EUVL process structure fabrication methodsSEMATECH INC·Filed 2013·Granted Oct 21, 2014·0 cites·25 claims
- 0653US7154101B2EUV energy detectionINTEL CORP·Filed 2003·Granted Dec 26, 2006·4 cites·13 claims
- 0751US7109504B2Extreme ultraviolet illumination sourceINTEL CORP·Filed 2004·Granted Sep 19, 2006·2 cites·25 claims
- 0849US2025273620A1Method for die-to-die hybrid bonding using an advanced distribution modelTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0944US7316893B2Modular containment cell arrangementsINTEL CORP·Filed 2002·Granted Jan 8, 2008·1 cites·27 claims
- 1039US2008073592A1Reflective optical illumination collectorPANNING ERIC M·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →