Inventor · disambiguated record
Yung Shan Chang
Also filed as: CHANG YUNG-SHAN
3 granted patents·2 pending applications·31 citations·filing 2002–2023
62Inventor score
Files withTEXAS INSTRUMENTS INC5
Top patents by PatentIndex Score
5 records- 0178US6660612B1Design to prevent tungsten oxidation at contact alignment in FeRAMTEXAS INSTRUMENTS INC·Filed 2002·Granted Dec 9, 2003·30 cites·18 claims
- 0262US9716013B2Sloped photoresist edges for defect reduction for metal dry etch processesTEXAS INSTRUMENTS INC·Filed 2014·Granted Jul 25, 2017·1 cites·14 claims
- 0356US2024361699A1Monitor structure for photoresist thickness in trenchTEXAS INSTRUMENTS INC·Filed 2023·Application pending·0 cites
- 0454US12170256B2Contact pad fabrication process for a semiconductor productTEXAS INSTRUMENTS INC·Filed 2021·Granted Dec 17, 2024·0 cites·25 claims
- 0536US2006284173A1Method to test shallow trench isolation fill capabilityTEXAS INSTRUMENTS INC·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →