Inventor · disambiguated record
Phi L. Nguyen
Also filed as: NGUYEN PHI · NGUYEN PHI L
7 granted patents·330 citations·filing 1996–2003
89Inventor score
Files withINTEL CORP7
Top patents by PatentIndex Score
7 records- 0194US6958547B2Interconnect structures containing conductive electrolessly deposited etch stop layers, liner layers, and via plugsINTEL CORP·Filed 2003·Granted Oct 25, 2005·71 cites·19 claims
- 0293US7008872B2Use of conductive electrolessly deposited etch stop layers, liner layers and via plugs in interconnect structuresINTEL CORP·Filed 2002·Granted Mar 7, 2006·59 cites·16 claims
- 0388US6968532B2Multiple exposure technique to pattern tight contact geometriesINTEL CORP·Filed 2003·Granted Nov 22, 2005·39 cites·25 claims
- 0482US5843846AEtch process to produce rounded top corners for sub-micron silicon trench applicationsINTEL CORP·Filed 1996·Granted Dec 1, 1998·76 cites·15 claims
- 0576US6472315B2Method of via patterning utilizing hard mask and stripping patterning material at low temperatureINTEL CORP·Filed 2001·Granted Oct 29, 2002·24 cites·6 claims
- 0667US5933759AMethod of controlling etch bias with a fixed lithography pattern for sub-micron critical dimension shallow trench applicationsINTEL CORP·Filed 1996·Granted Aug 3, 1999·37 cites·33 claims
- 0757US6001699AHighly selective etch process for submicron contactsINTEL CORP·Filed 1996·Granted Dec 14, 1999·24 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →