Inventor · disambiguated record
Kenneth C. Harvey
Also filed as: HARVEY KENNETH C
13 granted patents·1 pending application·345 citations·filing 1982–2009
94Inventor score
Top patents by PatentIndex Score
14 records- 0195US7339682B2Heterodyne reflectometer for film thickness monitoring and method for implementingVERITY INSTR INC·Filed 2005·Granted Mar 4, 2008·47 cites·62 claims
- 0291US8125633B2Calibration of a radiometric optical monitoring system used for fault detection and process monitoringWHELAN MIKE·Filed 2008·Granted Feb 28, 2012·38 cites·48 claims
- 0388US9997325B2Electron beam exciter for use in chemical analysis in processing systemsHOSCH JIMMY W·Filed 2009·Granted Jun 12, 2018·24 cites·9 claims
- 0484US6830939B2System and method for determining endpoint in etch processes using partial least squares discriminant analysis in the time domain of optical emission spectraVERITY INSTR INC·Filed 2002·Granted Dec 14, 2004·39 cites·29 claims
- 0583US6548999B2RMS power sensor with 84 dB dynamic rangeANRITSU CO·Filed 2001·Granted Apr 15, 2003·25 cites·3 claims
- 0680US7630859B2Method and apparatus for reducing the effects of window clouding on a viewport window in a reactive environmentVERITY INSTR INC·Filed 2007·Granted Dec 8, 2009·7 cites·31 claims
- 0777US6326274B2Method for improving performance and reliability of MOS technologies and data retention characteristics of flash memory cellsTEXAS INSTRUMENTS INC·Filed 2001·Granted Dec 4, 2001·18 cites·20 claims
- 0871US6291984B1Dual mode diode power sensor with square law and linear operating regionsANRITSU CO·Filed 1999·Granted Sep 18, 2001·34 cites·17 claims
- 0965US6017806AMethod to enhance deuterium anneal/implant to reduce channel-hot carrier degradationTEXAS INSTRUMENTS INC·Filed 1998·Granted Jan 25, 2000·32 cites·20 claims
- 1064US6331769B1RMS power sensor with 84 dB dynamic rangeANRITSU CO·Filed 1999·Granted Dec 18, 2001·21 cites·13 claims
- 1157US4555122ATracking scooter and the like and method of operationHARVEY KENNETH C·Filed 1982·Granted Nov 26, 1985·29 cites·2 claims
- 1253US6071751ADeuterium sintering with rapid quenchingTEXAS INSTRUMENTS INC·Filed 1998·Granted Jun 6, 2000·17 cites·7 claims
- 1352US6221705B1Method for improving performance and reliability of MOS technologies and data retention characteristics of flash memory cellsTEXAS INSTRUMENTS INC·Filed 1998·Granted Apr 24, 2001·14 cites·24 claims
- 1449US2008233016A1Multichannel array as window protectionVERITY INSTR INC·Filed 2007·Application pending·0 cites
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