Inventor · disambiguated record
Tatsuo Itagaki
Also filed as: ITAGAKI TATSUO
5 granted patents·463 citations·filing 1988–1990
86Inventor score
Technology areasH10W
Files withHITACHI LTD5
Top patents by PatentIndex Score
5 records- 0196US4999096AMethod of and apparatus for sputteringHITACHI LTD·Filed 1988·Granted Mar 12, 1991·196 cites·20 claims
- 0294US5061985ASemiconductor integrated circuit device and process for producing the sameHITACHI LTD·Filed 1989·Granted Oct 29, 1991·164 cites·24 claims
- 0376US5175608AMethod of and apparatus for sputtering, and integrated circuit deviceHITACHI LTD·Filed 1990·Granted Dec 29, 1992·55 cites·5 claims
- 0462US5019891ASemiconductor device and method of fabricating the sameHITACHI LTD·Filed 1989·Granted May 28, 1991·29 cites·39 claims
- 0549US5051812ASemiconductor device and method for manufacturing the sameHITACHI LTD·Filed 1990·Granted Sep 24, 1991·19 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →