Inventor · disambiguated record
Thomas Missalla
Also filed as: MISSALLA THOMAS
4 granted patents·1 pending application·22 citations·filing 2003–2020
70Inventor score
Top patents by PatentIndex Score
5 records- 0178US7329876B2Narrow-band transmission filter for EUV radiationXTREME TECH GMBH·Filed 2007·Granted Feb 12, 2008·6 cites·15 claims
- 0267US7328885B2Plasma radiation source and device for creating a gas curtain for plasma radiation sourcesXTREME TECH GMBH·Filed 2004·Granted Feb 12, 2008·14 cites·17 claims
- 0352US8686372B2Method for the spatially resolved measurement of parameters in a cross section of a beam bundle of high-energy radiation of high intensityMISSALLA THOMAS·Filed 2011·Granted Apr 1, 2014·2 cites·17 claims
- 0435US11615897B2Microscopic system for testing structures and defects on EUV lithography photomasksRI RES INSTRUMENTS GMBH·Filed 2020·Granted Mar 28, 2023·0 cites·11 claims
- 0532US2004062350A1Arrangement for determining the spectral reflectivity of a measurement objectJENOPTIK MIKROTECHNIK GMBH·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →