Inventor · disambiguated record
Michael Steigerwald
Also filed as: STEIGERWALD MICHAEL · STEIGERWALD MICHAEL D G
16 granted patents·1 pending application·236 citations·filing 2002–2022
93Inventor score
Top patents by PatentIndex Score
17 records- 0195US6855938B2Objective lens for an electron microscopy system and electron microscopy systemZEISS CARL NTS GMBH·Filed 2003·Granted Feb 15, 2005·97 cites·51 claims
- 0294US8304750B2Scanning charged particle beamsPREIKSZAS DIRK·Filed 2008·Granted Nov 6, 2012·51 cites·30 claims
- 0390US7518122B2Ion sources, systems and methodsALIS CORP·Filed 2006·Granted Apr 14, 2009·19 cites·10 claims
- 0487US12165831B2Method and system of image-forming multi-electron beamsKLA CORP·Filed 2022·Granted Dec 10, 2024·1 cites·22 claims
- 0586US7425701B2Electron-beam device and detector systemZEISS CARL NTS GMBH·Filed 2004·Granted Sep 16, 2008·20 cites·20 claims
- 0681US7910887B2Electron-beam device and detector systemZEISS CARL NTS GMBH·Filed 2009·Granted Mar 22, 2011·4 cites·23 claims
- 0780US7507962B2Electron-beam device and detector systemZEISS CARL NTS GMBH·Filed 2006·Granted Mar 24, 2009·4 cites·13 claims
- 0878US6903337B2Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the sameZEISS CARL SMT AG·Filed 2002·Granted Jun 7, 2005·15 cites·34 claims
- 0970US7022987B2Particle-optical arrangements and particle-optical systemsZEISS CARL NTS GMBH·Filed 2003·Granted Apr 4, 2006·8 cites·43 claims
- 1068US6828565B2Electron beam source, electron optical apparatus using such beam source and method of operating and electron beam sourceZEISS CARL NTS GMBH·Filed 2003·Granted Dec 7, 2004·7 cites·21 claims
- 1166US8283641B2Positioning device for a particle beam apparatusDOENITZ DIETMAR·Filed 2009·Granted Oct 9, 2012·5 cites·32 claims
- 1263US6949744B2Electron microscopy system, electron microscopy method and focusing system for charged particlesZEISS CARL NTS GMBH·Filed 2004·Granted Sep 27, 2005·5 cites·42 claims
- 1362US12283453B2Creating multiple electron beams with a photocathode filmKLA CORP·Filed 2022·Granted Apr 22, 2025·0 cites·28 claims
- 1462US12068129B2Tilt-column multi-beam electron microscopy system and methodKLA CORP·Filed 2022·Granted Aug 20, 2024·0 cites·29 claims
- 1554US11749495B2Bandpass charged particle energy filtering detector for charged particle toolsKLA CORP·Filed 2021·Granted Sep 5, 2023·0 cites·35 claims
- 1654US8063364B2Particle optical device with magnet assemblyPREIKSZAS DIRK·Filed 2009·Granted Nov 22, 2011·0 cites·26 claims
- 1749US2023245933A1Combining focused ion beam milling and scanning electron microscope imagingKLA CORP·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →