Inventor · disambiguated record
Tohru Segawa
Also filed as: SEGAWA TOHRU
4 granted patents·2 pending applications·107 citations·filing 1996–2003
77Inventor score
Top patents by PatentIndex Score
6 records- 0195US6869898B2Quartz glass jig for processing apparatus using plasmaHERAEUS QUARZGLAS·Filed 2001·Granted Mar 22, 2005·79 cites·8 claims
- 0271US7841211B2Production process of synthetic quartz glassSHINETSU QUARTZ PROD·Filed 2003·Granted Nov 30, 2010·13 cites·13 claims
- 0355US5876473AMethod of producing cristobalite containing silica glassFiled 1996·Granted Mar 2, 1999·13 cites·4 claims
- 0448US6680455B2Plasma resistant quartz glass jigHERAEUS QUARZGLAS·Filed 2001·Granted Jan 20, 2004·2 cites·8 claims
- 0545US2004050102A1Silica glass jig for semiconductor industry and method for producing the sameFiled 2003·Application pending·0 cites
- 0643US2002078886A1Silica glass jig for semiconductor industry and method for producing the sameFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →