Inventor · disambiguated record
Bunya Matsui
Also filed as: MATSUI BUNYA
5 granted patents·167 citations·filing 1973–1999
83Inventor score
Top patents by PatentIndex Score
5 records- 0194US3979241AMethod of etching films of silicon nitride and silicon dioxideFUJITSU LTD·Filed 1973·Granted Sep 7, 1976·67 cites·4 claims
- 0278US6403410B1Plasma doping system and plasma doping methodCANON SALES CO INC·Filed 1999·Granted Jun 11, 2002·32 cites·12 claims
- 0370US5286681AMethod for manufacturing semiconductor device having a self-planarizing filmCANON SALES CO INC·Filed 1992·Granted Feb 15, 1994·48 cites·6 claims
- 0446US6435196B1Impurity processing apparatus and method for cleaning impurity processing apparatusCANON SALES CO INC·Filed 1999·Granted Aug 20, 2002·14 cites·5 claims
- 0532US6207537B1Method for formation of impurity region in semiconductor layer and apparatus for introducing impurity to semiconductor layerSEMICONDUCTOR PROCESS LAB CO·Filed 1999·Granted Mar 27, 2001·6 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →