Inventor · disambiguated record
Thomas Augustus Mattaar
Also filed as: MATTAAR THOMAS AUGUSTUS
10 granted patents·1 pending application·50 citations·filing 2003–2023
84Inventor score
Top patents by PatentIndex Score
11 records- 0184US11105619B2Measurement apparatusASML NETHERLANDS BV·Filed 2018·Granted Aug 31, 2021·3 cites·20 claims
- 0281US6977461B2System and method for moving an object employing piezo actuatorsASML NETHERLANDS BV·Filed 2003·Granted Dec 20, 2005·24 cites·26 claims
- 0376US7173363B2System and method for moving an object employing piezo actuatorsASML NETHERLANDS BV·Filed 2004·Granted Feb 6, 2007·20 cites·21 claims
- 0474US2024151520A1Measurement apparatusASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0573US8102513B2Method for positioning an object by an electromagnetic motor, stage apparatus and lithographic apparatusCOX HENRIKUS HERMAN MARIE·Filed 2008·Granted Jan 24, 2012·3 cites·15 claims
- 0671US11874103B2Measurement apparatusASML NETHERLANDS BV·Filed 2021·Granted Jan 16, 2024·0 cites·20 claims
- 0752US8982327B2Method for positioning an object by an electromagnetic motor, stage apparatus and lithographic apparatusCOX HENRIKUS HERMAN MARIE·Filed 2011·Granted Mar 17, 2015·0 cites·20 claims
- 0850US12405542B2Method of determining a mark measurement sequence, stage apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Sep 2, 2025·0 cites·28 claims
- 0937US8681316B2Measurement system, method and lithographic apparatusCOX HENRIKUS HERMAN MARIE·Filed 2011·Granted Mar 25, 2014·0 cites·18 claims
- 1034US10627721B2Lithography apparatus, and a method of manufacturing a deviceASML NETHERLANDS BV·Filed 2016·Granted Apr 21, 2020·0 cites·23 claims
- 1133US7224428B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted May 29, 2007·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →