Inventor · disambiguated record
Loren W. Linholm
Also filed as: LINHOLM LOREN · LINHOLM LOREN W · LINHOLM LOREN WENDELL
10 granted patents·672 citations·filing 1991–1997
92Inventor score
Files withUS COMMERCE10
Top patents by PatentIndex Score
10 records- 0193US5923041AOverlay target and measurement procedure to enable self-correction for wafer-induced tool-induced shift by imaging sensor meansUS COMMERCE·Filed 1995·Granted Jul 13, 1999·113 cites·8 claims
- 0290US5617340AMethod and reference standards for measuring overlay in multilayer structures, and for calibrating imaging equipment as used in semiconductor manufacturingUS COMMERCE·Filed 1995·Granted Apr 1, 1997·133 cites·36 claims
- 0388US5857258AElectrical test structure and method for measuring the relative locations of conductive features on an insulating substrateUS COMMERCE·Filed 1994·Granted Jan 12, 1999·133 cites·4 claims
- 0485US5602492AElectrical test structure and method for measuring the relative locations of conducting features on an insulating substrateUS COMMERCE·Filed 1994·Granted Feb 11, 1997·108 cites·3 claims
- 0581US5218211ASystem for sampling the sizes, geometrical distribution, and frequency of small particles accumulating on a solid surfaceUS COMMERCE·Filed 1991·Granted Jun 8, 1993·47 cites·30 claims
- 0678US5920067AMonocrystalline test and reference structures, and use for calibrating instrumentsUS COMMERCE·Filed 1997·Granted Jul 6, 1999·43 cites·26 claims
- 0772US5383136AElectrical test structure and method for measuring the relative locations of conducting features on an insulating substrateUS COMMERCE·Filed 1992·Granted Jan 17, 1995·57 cites·6 claims
- 0854US5684301AMonocrystalline test structures, and use for calibrating instrumentsUS COMMERCE·Filed 1995·Granted Nov 4, 1997·21 cites·10 claims
- 0944US5247262ALinewidth micro-bridge test structureUS COMMERCE·Filed 1992·Granted Sep 21, 1993·15 cites·6 claims
- 1026US5373232AMethod of and articles for accurately determining relative positions of lithographic artifactsUS COMMERCE·Filed 1993·Granted Dec 13, 1994·2 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →