Inventor · disambiguated record

Niichi Atsumi

Also filed as: ATSUMI NIICHI

1 granted patent·90 citations·filing 2003–2003

52Inventor score

Technology areasG03F

Files withNIKON CORP1

Top patents by PatentIndex Score

1 record

0193US7098992B2Light source unit and wavelength stabilizing control method, exposure apparatus and exposure method, method of making exposure apparatus, and device manufacturing method and deviceNIKON CORP·Filed 2003·Granted Aug 29, 2006·90 cites·82 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →