Inventor · disambiguated record
Hamid Norrbakhsh
Also filed as: NORRBAKHSH HAMID
2 granted patents·116 citations·filing 2000–2001
69Inventor score
Technology areasH10P
Files withAPPLIED MATERIALS INC2
Top patents by PatentIndex Score
2 records- 0193US6353210B1Correction of wafer temperature drift in a plasma reactor based upon continuous wafer temperature measurements using and in-situ wafer temperature optical probeAPPLIED MATERIALS INC·Filed 2000·Granted Mar 5, 2002·85 cites·20 claims
- 0284US6575622B2Correction of wafer temperature drift in a plasma reactor based upon continuous wafer temperature measurements using an in-situ wafer temperature optical probeAPPLIED MATERIALS INC·Filed 2001·Granted Jun 10, 2003·31 cites·4 claims
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