Inventor · disambiguated record
Craig R. Simpson
Also filed as: SIMPSON CRAIG · SIMPSON CRAIG R
7 granted patents·229 citations·filing 1988–2013
86Inventor score
Top patents by PatentIndex Score
7 records- 0191US5677758ALithography System using dual substrate stagesMRS TECHNOLOGY INC·Filed 1995·Granted Oct 14, 1997·136 cites·15 claims
- 0287US8395783B2System metrology coreDONAHER J CASEY·Filed 2010·Granted Mar 12, 2013·10 cites·38 claims
- 0379US5828142APlaten for use with lithographic stages and method of making sameMRS TECHNOLOGY INC·Filed 1997·Granted Oct 27, 1998·51 cites·25 claims
- 0469US4855792AOptical alignment system for use in photolithography and having reduced reflectance errorsMRS TECHNOLOGY INC·Filed 1988·Granted Aug 8, 1989·20 cites·19 claims
- 0558US6483572B2Reticle alignment system for use in lithographyAZORES CORP·Filed 2001·Granted Nov 19, 2002·6 cites·5 claims
- 0640US9625832B2Planar motor system with increased efficiencyRUDOLPH TECH INC·Filed 2013·Granted Apr 18, 2017·0 cites·12 claims
- 0733US6320644B1Reticle alignment system for use in lithographyFiled 1994·Granted Nov 20, 2001·6 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →