Inventor · disambiguated record
Michinori Kawaguchi
Also filed as: KAWAGUCHI MICHINORI
4 granted patents·1 pending application·15 citations·filing 2006–2013
64Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0184US7353076B2Vacuum processing method and vacuum processing apparatusHITACHI HIGH TECH CORP·Filed 2006·Granted Apr 1, 2008·14 cites·10 claims
- 0258US8588962B2Vacuum processing device and method of transporting process subject memberHITACHI HIGH TECH CORP·Filed 2012·Granted Nov 19, 2013·1 cites·6 claims
- 0339US9257318B2Operation method for vacuum processing apparatusHITACHI HIGH TECH CORP·Filed 2013·Granted Feb 9, 2016·0 cites·5 claims
- 0437US2014099176A1Vacuum processing apparatus and vacuum processing methodHITACHI HIGH TECH CORP·Filed 2013·Application pending·0 cites
- 0536US8812151B2Vacuum process device and vacuum process methodNAKATA TERUO·Filed 2012·Granted Aug 19, 2014·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →