Inventor · disambiguated record

Robertus Victorius Maria Scheepens

Also filed as: SCHEEPENS ROBERTUS VICTORIUS M

1 granted patent·19 citations·filing 2004–2004

39Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0177US7420676B2Alignment method, method of measuring front to backside alignment error, method of detecting non-orthogonality, method of calibration, and lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Sep 2, 2008·19 cites·25 claims

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