Inventor · disambiguated record
Hikaru Yamamura
Also filed as: YAMAMURA HIKARU
4 granted patents·2 citations·filing 2013–2020
58Inventor score
Files withNUFLARE TECHNOLOGY INC4
Top patents by PatentIndex Score
4 records- 0167US10971331B2Writing data generation method, computer-readable recording medium on which program is recorded, and multi-charged particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2019·Granted Apr 6, 2021·1 cites·10 claims
- 0258US9236154B2Charged-particle beam drawing method, computer-readable recording media, and charged-particle beam drawing apparatusNUFLARE TECHNOLOGY INC·Filed 2013·Granted Jan 12, 2016·1 cites·6 claims
- 0348US11556114B2Drawing apparatus and drawing methodNUFLARE TECHNOLOGY INC·Filed 2020·Granted Jan 17, 2023·0 cites·17 claims
- 0438US9460892B2Charged particle beam writing method, computer-readable recording medium, and charged particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2013·Granted Oct 4, 2016·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →