Inventor · disambiguated record
Stephan Koelink
Also filed as: KOELINK STEPHAN
3 granted patents·1 pending application·6 citations·filing 2004–2011
59Inventor score
Technology areasG03F
Top patents by PatentIndex Score
4 records- 0168US7271873B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Sep 18, 2007·3 cites·28 claims
- 0248US7072021B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jul 4, 2006·3 cites·11 claims
- 0336US2012069309A1Fluid handling structure, module for an immersion lithographic apparatus, lithographic apparatus and device manufacturing methodWILLEMS PAUL·Filed 2011·Application pending·0 cites
- 0435US7148951B2Lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Dec 12, 2006·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →