Inventor · disambiguated record
Eiichiro Kikuchi
Also filed as: KIKUCHI EIICHIRO
6 granted patents·3 pending applications·1 citations·filing 2007–2017
66Inventor score
Top patents by PatentIndex Score
9 records- 0170US10541158B2Temperature adjustment method using wet surface in a processing chamberTOKYO ELECTRON LTD·Filed 2017·Granted Jan 21, 2020·1 cites·3 claims
- 0249US9214376B2Substrate mounting stage and surface treatment method thereforHIGUMA MASAKAZU·Filed 2008·Granted Dec 15, 2015·0 cites·16 claims
- 0345US8343372B2Surface processing method for mounting stageTOKYO ELECTRON LTD·Filed 2008·Granted Jan 1, 2013·0 cites·8 claims
- 0444US7815492B2Surface treatment methodTOKYO ELECTRON LTD·Filed 2007·Granted Oct 19, 2010·0 cites·6 claims
- 0544US2012043024A1Substrate processing apparatus and temperature adjustment methodSASAKI YASUHARU·Filed 2011·Application pending·0 cites
- 0643US10651813B2Method for designing filterTOKYO ELECTRON LTD·Filed 2017·Granted May 12, 2020·0 cites·8 claims
- 0742US2012160808A1Substrate processing apparatus and substrate processing methodKIKUCHI EIICHIRO·Filed 2011·Application pending·0 cites
- 0841US2015200080A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
- 0938US8545672B2Plasma processing apparatusNAGAYAMA NOBUYUKI·Filed 2011·Granted Oct 1, 2013·0 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →