Inventor · disambiguated record
Vu Ngoc Tran Nguyen
Also filed as: NGUYEN VU · NGUYEN VU NGOC T · NGUYEN VU NGOC TRAN
7 granted patents·4 pending applications·45 citations·filing 2004–2025
80Inventor score
Top patents by PatentIndex Score
11 records- 0194US7297376B1Method to reduce gas-phase reactions in a PECVD process with silicon and organic precursors to deposit defect-free initial layersAPPLIED MATERIALS INC·Filed 2006·Granted Nov 20, 2007·33 cites·26 claims
- 0285US7615482B2Structure and method for porous SiCOH dielectric layers and adhesion promoting or etch stop layers having increased interfacial and mechanical strengthIBM·Filed 2007·Granted Nov 10, 2009·6 cites·21 claims
- 0376US2025344971A1Dry electrochemical impedance spectroscopy metrology for conductive chemical layersMEDTRONIC MINIMED INC·Filed 2025·Application pending·0 cites
- 0466US7399364B2Hermetic cap layers formed on low-κ films by plasma enhanced chemical vapor depositionAPPLIED MATERIALS INC·Filed 2006·Granted Jul 15, 2008·2 cites·7 claims
- 0565US12433515B2Dry electrochemical impedance spectroscopy metrology for conductive chemical layersMEDTRONIC MINIMED INC·Filed 2021·Granted Oct 7, 2025·0 cites·20 claims
- 0656US7285503B2Hermetic cap layers formed on low-k films by plasma enhanced chemical vapor depositionAPPLIED MATERIALS INC·Filed 2004·Granted Oct 23, 2007·4 cites·26 claims
- 0755US2010009161A1STRUCTURE AND METHOD FOR SiCOH INTERFACES WITH INCREASED MECHANICAL STRENGTHIBM·Filed 2009·Application pending·0 cites
- 0851US2007207275A1Enhancement of remote plasma source clean for dielectric filmsAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 0944US11145504B2Method of forming film stacks with reduced defectsAPPLIED MATERIALS INC·Filed 2019·Granted Oct 12, 2021·0 cites·18 claims
- 1042US2007042131A1Non-intrusive plasma monitoring system for arc detection and prevention for blanket CVD filmsAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 1139US10113234B2UV assisted silylation for porous low-k film sealingAPPLIED MATERIALS INC·Filed 2015·Granted Oct 30, 2018·0 cites·2 claims
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