Inventor · disambiguated record
Steven S. Cooperman
Also filed as: COOPERMAN STEVEN S
3 granted patents·419 citations·filing 1993–1994
79Inventor score
Files withDIGITAL EQUIPMENT CORP3
Top patents by PatentIndex Score
3 records- 0194US5492858AShallow trench isolation process for high aspect ratio trenchesDIGITAL EQUIPMENT CORP·Filed 1994·Granted Feb 20, 1996·249 cites·12 claims
- 0287US5494857AChemical mechanical planarization of shallow trenches in semiconductor substratesDIGITAL EQUIPMENT CORP·Filed 1993·Granted Feb 27, 1996·122 cites·17 claims
- 0371US5346584APlanarization process for IC trench isolation using oxidized polysilicon fillerDIGITAL EQUIPMENT CORP·Filed 1993·Granted Sep 13, 1994·48 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →