Inventor · disambiguated record
Hideaki Nagasaki
Also filed as: NAGASAKI HIDEAKI
3 granted patents·1 pending application·0 citations·filing 2020–2022
39Inventor score
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0160US11710614B2Light interference system and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Jul 25, 2023·0 cites·11 claims
- 0253US11920928B2System and method for correcting optical path length measurement errorsTOKYO ELECTRON LTD·Filed 2022·Granted Mar 5, 2024·0 cites·13 claims
- 0343US2022230856A1Plasma processing system and plasma processing methodTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0442US11264267B2Apparatus for processing substrate and method for detecting a presence of a focus ring on a stageTOKYO ELECTRON LTD·Filed 2020·Granted Mar 1, 2022·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →