Inventor · disambiguated record
Joseph M. Ranish
Also filed as: RANISH JOSEPH · RANISH JOSEPH M · RANISH JOSEPH MICHAEL
174 granted patents·34 pending applications·2,716 citations·filing 1992–2024
99Inventor score
Top patents by PatentIndex Score
208 records- 0199US7651955B2Method for forming silicon-containing materials during a photoexcitation deposition processAPPLIED MATERIALS INC·Filed 2006·Granted Jan 26, 2010·533 cites·25 claims
- 0299US7648927B2Method for forming silicon-containing materials during a photoexcitation deposition processAPPLIED MATERIALS INC·Filed 2006·Granted Jan 19, 2010·497 cites·36 claims
- 0399US7547633B2UV assisted thermal processingAPPLIED MATERIALS INC·Filed 2006·Granted Jun 16, 2009·473 cites·20 claims
- 0498US7279721B2Dual wavelength thermal flux laser annealAPPLIED MATERIALS INC·Filed 2005·Granted Oct 9, 2007·46 cites·21 claims
- 0597US8057602B2Apparatus and method for supporting, positioning and rotating a substrate in a processing chamberKOELMEL BLAKE·Filed 2008·Granted Nov 15, 2011·63 cites·30 claims
- 0697US7800081B2Pulse train annealing method and apparatusAPPLIED MATERIALS INC·Filed 2008·Granted Sep 21, 2010·41 cites·16 claims
- 0797US7135392B1Thermal flux laser annealing for ion implantation of semiconductor P-N junctionsAPPLIED MATERIALS INC·Filed 2005·Granted Nov 14, 2006·50 cites·10 claims
- 0896US8222574B2Temperature measurement and control of wafer support in thermal processing chamberSORABJI KHURSHED·Filed 2008·Granted Jul 17, 2012·62 cites·19 claims
- 0996US7595208B2Method of laser annealing using two wavelengths of radiationAPPLIED MATERIALS INC·Filed 2007·Granted Sep 29, 2009·22 cites·20 claims
- 1095US12163229B2Multi zone spot heating in EPIAPPLIED MATERIALS INC·Filed 2023·Granted Dec 10, 2024·1 cites·20 claims
- 1195US11821088B2Multi zone spot heating in EPIAPPLIED MATERIALS INC·Filed 2021·Granted Nov 21, 2023·2 cites·19 claims
- 1295US10376916B2Substrate processing system having susceptorless substrate support with enhanced substrate heating controlAPPLIED MATERIALS INC·Filed 2017·Granted Aug 13, 2019·10 cites·12 claims
- 1395US9390950B2Rapid thermal processing chamber with micro-positioning systemAPPLIED MATERIALS INC·Filed 2014·Granted Jul 12, 2016·15 cites·20 claims
- 1495US7860379B2Temperature measurement and control of wafer support in thermal processing chamberAPPLIED MATERIALS INC·Filed 2007·Granted Dec 28, 2010·27 cites·4 claims
- 1594US8744250B2Edge ring for a thermal processing chamberKOELMEL BLAKE·Filed 2011·Granted Jun 3, 2014·13 cites·7 claims
- 1694US8314371B2Rapid thermal processing chamber with micro-positioning systemSORABJI KHURSHED·Filed 2009·Granted Nov 20, 2012·18 cites·12 claims
- 1794US7129440B2Single axis light pipe for homogenizing slow axis of illumination systems based on laser diodesAPPLIED MATERIALS INC·Filed 2005·Granted Oct 31, 2006·26 cites·17 claims
- 1893US9330955B2Support ring with masked edgeAPPLIED MATERIALS INC·Filed 2014·Granted May 3, 2016·10 cites·20 claims
- 1993US8900889B2Rapid thermal processing chamber with micro-positioning systemAPPLIED MATERIALS INC·Filed 2012·Granted Dec 2, 2014·10 cites·10 claims
- 2092US9845550B2Upper dome with injection assemblyAPPLIED MATERIALS INC·Filed 2015·Granted Dec 19, 2017·7 cites·20 claims
- 2192US9659809B2Support cylinder for thermal processing chamberAPPLIED MATERIALS INC·Filed 2016·Granted May 23, 2017·6 cites·20 claims
- 2292US8294068B2Rapid thermal processing lamphead with improved coolingRANISH JOSEPH M·Filed 2008·Granted Oct 23, 2012·17 cites·21 claims
- 2392US8111978B2Rapid thermal processing chamber with shower headSORABJI KHURSHED·Filed 2008·Granted Feb 7, 2012·21 cites·24 claims
- 2492US7509035B2Lamp array for thermal processing exhibiting improved radial uniformityAPPLIED MATERIALS INC·Filed 2005·Granted Mar 24, 2009·37 cites·9 claims
- 2592US6805466B1Lamphead for a rapid thermal processing chamberAPPLIED MATERIALS INC·Filed 2000·Granted Oct 19, 2004·56 cites·40 claims
- 2692US6376804B1Semiconductor processing system with lamp coolingAPPLIED MATERIALS INC·Filed 2000·Granted Apr 23, 2002·60 cites·19 claims
- 2791US11393703B2Apparatus and method for controlling a flow process material to a deposition chamberAPPLIED MATERIALS INC·Filed 2019·Granted Jul 19, 2022·6 cites·14 claims
- 2891US11021795B2Multi zone spot heating in epiAPPLIED MATERIALS INC·Filed 2018·Granted Jun 1, 2021·4 cites·19 claims
- 2991US10741457B2System for non radial temperature control for rotating substratesAPPLIED MATERIALS INC·Filed 2017·Granted Aug 11, 2020·4 cites·20 claims
- 3091US10128197B2Bottom processingAPPLIED MATERIALS INC·Filed 2016·Granted Nov 13, 2018·6 cites·20 claims
- 3191US8387557B2Method for forming silicon-containing materials during a photoexcitation deposition processSINGH KAUSHAL K·Filed 2009·Granted Mar 5, 2013·15 cites·8 claims
- 3290US10202707B2Substrate processing system with lamphead having temperature managementAPPLIED MATERIALS INC·Filed 2013·Granted Feb 12, 2019·4 cites·18 claims
- 3390US8367983B2Apparatus including heating source reflective filter for pyrometryAPPLIED MATERIALS INC·Filed 2009·Granted Feb 5, 2013·14 cites·20 claims
- 3490US8249436B2System for non radial temperature control for rotating substratesADERHOLD WOLFGANG R·Filed 2009·Granted Aug 21, 2012·11 cites·19 claims
- 3590US7398693B2Adaptive control method for rapid thermal processing of a substrateAPPLIED MATERIALS INC·Filed 2006·Granted Jul 15, 2008·19 cites·33 claims
- 3689US10857623B2Annealing apparatus using two wavelengths of radiationAPPLIED MATERIALS INC·Filed 2017·Granted Dec 8, 2020·2 cites·20 claims
- 3789USRE44712ELamp for rapid thermal processing chamberRANISH JOSEPH M·Filed 2011·Granted Jan 21, 2014·8 cites·30 claims
- 3889US7772134B2Method of annealing using two wavelengths of continuous wave laser radiationAPPLIED MATERIALS INC·Filed 2009·Granted Aug 10, 2010·7 cites·18 claims
- 3988US8901518B2Chambers with improved cooling devicesAPPLIED MATERIALS INC·Filed 2013·Granted Dec 2, 2014·8 cites·20 claims
- 4088US8865602B2Edge ring lipAPPLIED MATERIALS INC·Filed 2012·Granted Oct 21, 2014·8 cites·14 claims
- 4188US8772055B1Multizone control of lamps in a conical lamphead using pyrometersRANISH JOSEPH M·Filed 2013·Granted Jul 8, 2014·6 cites·5 claims
- 4288US8724977B2System for non radial temperature control for rotating substratesADERHOLD WOLFGANG R·Filed 2012·Granted May 13, 2014·6 cites·20 claims
- 4388US8404048B2Off-angled heating of the underside of a substrate using a lamp assemblyEWERT MAURICE E·Filed 2011·Granted Mar 26, 2013·12 cites·16 claims
- 4488US8242407B2Annealing apparatus using two wavelengths of continuous wave laser radiationJENNINGS DEAN·Filed 2010·Granted Aug 14, 2012·5 cites·20 claims
- 4588US8057601B2Apparatus and method for supporting, positioning and rotating a substrate in a processing chamberKOELMEL BLAKE·Filed 2007·Granted Nov 15, 2011·11 cites·49 claims
- 4688US7978964B2Substrate processing chamber with dielectric barrier discharge lamp assemblyAPPLIED MATERIALS INC·Filed 2006·Granted Jul 12, 2011·12 cites·23 claims
- 4788US6888104B1Thermally matched support ring for substrate processing chamberAPPLIED MATERIALS INC·Filed 2004·Granted May 3, 2005·41 cites·25 claims
- 4887US9839976B2Annealing apparatus using two wavelengths of radiationAPPLIED MATERIALS INC·Filed 2014·Granted Dec 12, 2017·3 cites·13 claims
- 4987US9498845B2Pulse train annealing method and apparatusAPPLIED MATERIALS INC·Filed 2012·Granted Nov 22, 2016·6 cites·5 claims
- 5087US8698049B2Rapid thermal processing lamphead with improved coolingAPPLIED MATERIALS INC·Filed 2012·Granted Apr 15, 2014·6 cites·20 claims
Showing the top 50 of 208 patent records by PatentIndex Score.
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