Inventor · disambiguated record
Tadashi Kotsugi
Also filed as: KOTSUGI TADASHI
7 granted patents·1 pending application·58 citations·filing 2006–2014
81Inventor score
Files withTOKYO ELECTRON LTD8
Top patents by PatentIndex Score
8 records- 0196US8993352B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Mar 31, 2015·43 cites·17 claims
- 0282US7554095B2Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method, and method of manufacturing substrateTOKYO ELECTRON LTD·Filed 2007·Granted Jun 30, 2009·7 cites·6 claims
- 0378US7521687B2Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrateTOKYO ELECTRON LTD·Filed 2006·Granted Apr 21, 2009·5 cites·19 claims
- 0471US8877081B2Etching method and etching apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Nov 4, 2014·2 cites·9 claims
- 0565US9691643B2Etching apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Jun 27, 2017·1 cites·8 claims
- 0652US7550739B2Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrateTOKYO ELECTRON LTD·Filed 2006·Granted Jun 23, 2009·0 cites·19 claims
- 0751US2009008579A1Electron beam lithography apparatus and design method of patterned beam-defining apertureTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 0842US9245764B2Semiconductor device manufacturing methodTOKYO ELECTRON LTD·Filed 2012·Granted Jan 26, 2016·0 cites·11 claims
Join the waitlist — get patent alerts
Get an alert when Tadashi Kotsugi files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →