Inventor · disambiguated record
Yung-Ti Hung
Also filed as: HUNG YUNG-TI
8 granted patents·1 pending application·2 citations·filing 2011–2019
75Inventor score
Top patents by PatentIndex Score
9 records- 0167US11273470B2In situ cleaning apparatus and system thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Mar 15, 2022·0 cites·20 claims
- 0263US10814455B2Slurry feed system and method of providing slurry to chemical mechanical planarization stationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Oct 27, 2020·0 cites·20 claims
- 0362US10043681B2Fluid supply system, wafer processing system, and method of supplying fluid to wafer processing equipmentTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Aug 7, 2018·2 cites·20 claims
- 0459US10500616B2In situ cleaning apparatus and system thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Dec 10, 2019·0 cites·20 claims
- 0558US9643217B2In situ clean apparatus and method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted May 9, 2017·0 cites·20 claims
- 0656US9744642B2Slurry feed system and method of providing slurry to chemical mechanical planarization stationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Aug 29, 2017·0 cites·21 claims
- 0745US8629356B2Magnetic field shielding raised floor panelYU CHWEN·Filed 2011·Granted Jan 14, 2014·0 cites·20 claims
- 0839US2015187562A1Abatement water flow control system and operation method thereofTAIWAN SEMICONDUCTOR MFG·Filed 2013·Application pending·0 cites
- 0938US9789448B2Process for treating fluidTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Oct 17, 2017·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →