Inventor · disambiguated record
Sumie Segawa
Also filed as: SEGAWA SUMIE
4 granted patents·2 pending applications·57 citations·filing 1999–2009
78Inventor score
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0191US7582182B2Method and apparatus for measuring electron density of plasma and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2007·Granted Sep 1, 2009·14 cites·6 claims
- 0282US7532322B2Method and apparatus for measuring electron density of plasma and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted May 12, 2009·6 cites·25 claims
- 0382US7339656B2Method and apparatus for measuring electron density of plasma and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2004·Granted Mar 4, 2008·20 cites·31 claims
- 0456US6207007B1Plasma processing systemTOKYO ELECTRON LTD·Filed 1999·Granted Mar 27, 2001·17 cites·8 claims
- 0546US2011061811A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0646US2011017706A1Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →