Inventor · disambiguated record
Frederik T. E. Heuts
Also filed as: HEUTS FREDERIK T E · HEUTS FREDERIK THEODORUS ELISA
4 granted patents·218 citations·filing 2000–2004
79Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV4
Top patents by PatentIndex Score
4 records- 0196US6674510B1Off-axis levelling in lithographic projection apparatusASML NETHERLANDS BV·Filed 2000·Granted Jan 6, 2004·192 cites·95 claims
- 0284US7019815B2Off-axis leveling in lithographic projection apparatusASML NETHERLANDS BV·Filed 2004·Granted Mar 28, 2006·19 cites·11 claims
- 0363US7202938B2Off-axis levelling in lithographic projection apparatusASML NETHERLANDS BV·Filed 2004·Granted Apr 10, 2007·5 cites·15 claims
- 0449US7361911B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 22, 2008·2 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →