Inventor · disambiguated record
Katsuaki Sugawara
Also filed as: SUGAWARA KATSUAKI
2 granted patents·1 pending application·1 citations·filing 2014–2016
29Inventor score
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0161US9583318B2Plasma processing apparatus, plasma processing method, and recording mediumTOKYO ELECTRON LTD·Filed 2016·Granted Feb 28, 2017·1 cites·7 claims
- 0239US2014345523A1Substrate ejection detection device, method of detecting substrate ejection and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 0337US10002417B2Ready for rotation state detection device, method of detecting ready for rotation state and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Jun 19, 2018·0 cites·15 claims
Join the waitlist — get patent alerts
Get an alert when Katsuaki Sugawara files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →