Inventor · disambiguated record
Fernando Silveira
Also filed as: SILVEIRA FERNANDO · SILVEIRA FERNANDO M
23 granted patents·8 pending applications·74 citations·filing 2001–2024
92Inventor score
Top patents by PatentIndex Score
31 records- 0192US6634313B2High-frequency electrostatically shielded toroidal plasma and radical sourceAPPLIED MATERIALS INC·Filed 2001·Granted Oct 21, 2003·42 cites·19 claims
- 0290US12111341B2In-situ electric field detection method and apparatusAPPLIED MATERIALS INC·Filed 2022·Granted Oct 8, 2024·1 cites·12 claims
- 0390US10410889B2Systems and methods for electrical and magnetic uniformity and skew tuning in plasma processing reactorsAPPLIED MATERIALS INC·Filed 2015·Granted Sep 10, 2019·7 cites·16 claims
- 0489US11837479B2Advanced temperature control for wafer carrier in plasma processing chamberAPPLIED MATERIALS INC·Filed 2016·Granted Dec 5, 2023·6 cites·7 claims
- 0588US12368020B2Pulsed voltage source for plasma processing applicationsAPPLIED MATERIALS INC·Filed 2024·Granted Jul 22, 2025·1 cites·20 claims
- 0682US9338871B2Feedforward temperature control for plasma processing apparatusMAHADESWARASWAMY CHETAN·Filed 2010·Granted May 10, 2016·5 cites·14 claims
- 0782US8916793B2Temperature control in plasma processing apparatus using pulsed heat transfer fluid flowSILVEIRA FERNANDO M·Filed 2011·Granted Dec 23, 2014·7 cites·13 claims
- 0881US2024426888A1In-situ electric field detection method and apparatusAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0972US12272575B2Advanced temperature control for wafer carrier in plasma processing chamberAPPLIED MATERIALS INC·Filed 2023·Granted Apr 8, 2025·0 cites·7 claims
- 1071US11972924B2Pulsed voltage source for plasma processing applicationsAPPLIED MATERIALS INC·Filed 2022·Granted Apr 30, 2024·0 cites·25 claims
- 1171US9695254B2Metallocene catalyst supported by hybrid supporting means, process for producing same, polymerization process for producing an ethylene homopolymer or copolymer with broad or bimodal molar mass distribution, use of the supported metallocene catalyst and ethylene polymer with broad or bimodal molar mass distributionBRASKEM SA·Filed 2012·Granted Jul 4, 2017·2 cites·6 claims
- 1270US10537013B2Distributed electro-static chuck coolingAPPLIED MATERIALS INC·Filed 2013·Granted Jan 14, 2020·2 cites·18 claims
- 1369US10854425B2Feedforward temperature control for plasma processing apparatusAPPLIED MATERIALS INC·Filed 2016·Granted Dec 1, 2020·1 cites·8 claims
- 1466US12125689B2Methods and apparatus for toroidal plasma generationAPPLIED MATERIALS INC·Filed 2022·Granted Oct 22, 2024·0 cites·20 claims
- 1562US2025349509A1Methods and apparatus that use inductively coupled plasma resonator sourcesAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1661US10928145B2Dual zone common catch heat exchanger/chillerAPPLIED MATERIALS INC·Filed 2019·Granted Feb 23, 2021·0 cites·11 claims
- 1760US9994648B2Metallocene catalyst supported by hybrid supporting means, process for producing same, polymerization process for producing an ethylene homopolymer or copolymer with broad or bimodal molar mass distribution, use of the supported metallocene catalyst and ethylene polymer with broad or bimodal molar mass distributionBRASKEM SA·Filed 2017·Granted Jun 12, 2018·0 cites·4 claims
- 1860US9988465B2Metallocene catalyst supported by hybrid supporting means, process for producing same, polymerization process for producing an ethylene homopolymer or copolymer with broad or bimodal molar mass distribution, use of the supported metallocene catalyst and ethylene polymer with broad or bimodal molar mass distributionBRASKEM SA·Filed 2017·Granted Jun 5, 2018·0 cites·11 claims
- 1960US2025006465A1Remote Plasma Source and Plasma Processing Chamber Having SameAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2059US12205797B2Solid-state switch based high-speed pulser with plasma IEDF modification capability through multilevel output functionalityAPPLIED MATERIALS INC·Filed 2022·Granted Jan 21, 2025·0 cites·17 claims
- 2159US9214315B2Temperature control in plasma processing apparatus using pulsed heat transfer fluid flowAPPLIED MATERIALS INC·Filed 2014·Granted Dec 15, 2015·0 cites·7 claims
- 2256US12456607B2Auxiliary plasma source for robust ignition and restrikes in a plasma chamberAPPLIED MATERIALS INC·Filed 2021·Granted Oct 28, 2025·0 cites·18 claims
- 2355US10274270B2Dual zone common catch heat exchanger/chillerAPPLIED MATERIALS INC·Filed 2012·Granted Apr 30, 2019·0 cites·9 claims
- 2453US2023335376A1Remote surface wave propagation for semiconductor chambersAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 2550US12278094B2Methods and apparatus for processing a substrateAPPLIED MATERIALS INC·Filed 2020·Granted Apr 15, 2025·0 cites·19 claims
- 2647US10010912B2Particle reduction via throttle gate valve purgeAPPLIED MATERIALS INC·Filed 2014·Granted Jul 3, 2018·0 cites·20 claims
- 2746US2016042961A1Electron beam plasma source with rotating cathode, backside helium cooling and liquid cooled pedestal for uniform plasma generationAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 2842US11186721B2Process for treatment of nanoparticles of mineral filler for use in polymerization in the presence of nanoparticlesBRASKEM SA·Filed 2014·Granted Nov 30, 2021·0 cites·24 claims
- 2939US2004237897A1High-Frequency electrostatically shielded toroidal plasma and radical sourceFiled 2003·Application pending·0 cites
- 3036US2018061679A1Multi chamber processing system with shared vacuum systemAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 3136US2011178240A1Process in Reactor to Prepare a Hybrid Polymeric Composition, Hybrid Polymeric Composition and ArticleBRASKEM SA·Filed 2010·Application pending·0 cites
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