Inventor · disambiguated record
Michiko Nishiwaki
Also filed as: NISHIWAKI MICHIKO
3 granted patents·2 pending applications·621 citations·filing 1997–2005
76Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0197US6483989B1Substrate processing apparatus and semiconductor device producing methodHITACHI INT ELECTRIC INC·Filed 2001·Granted Nov 19, 2002·551 cites·7 claims
- 0280US6217663B1Substrate processing apparatus and substrate processing methodKOKUSAI ELECTRIC CO LTD·Filed 1997·Granted Apr 17, 2001·69 cites·58 claims
- 0347US2006075972A1Substrate processing apparatus and substrate processing methodHITACHI INT ELECTRIC INC·Filed 2005·Application pending·0 cites
- 0446US6541344B2Substrate processing apparatus and semiconductor device manufacturing methodHITACHI INT ELECTRIC INC·Filed 2001·Granted Apr 1, 2003·1 cites·20 claims
- 0537US2002017363A1Substrate processing apparatus and substrate processing methodFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →