Inventor · disambiguated record
Loke Yuen Wong
Also filed as: WONG LOKE YUEN
5 granted patents·2 pending applications·14 citations·filing 2012–2023
75Inventor score
Top patents by PatentIndex Score
7 records- 0186US10629430B2Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabricationsAPPLIED MATERIALS INC·Filed 2018·Granted Apr 21, 2020·4 cites·22 claims
- 0278US9960035B2Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabricationsAPPLIED MATERIALS INC·Filed 2017·Granted May 1, 2018·2 cites·20 claims
- 0377US9548200B2Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabricationsAPPLIED MATERIALS INC·Filed 2014·Granted Jan 17, 2017·3 cites·18 claims
- 0476US9472392B2Step coverage dielectricAPPLIED MATERIALS INC·Filed 2015·Granted Oct 18, 2016·3 cites·16 claims
- 0565US2024084446A1Reaction chamber component, deposition apparatus provided with such component and method of protecting such componentASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 0660US10723112B2Method of transferring thin filmCHUA LAY LAY·Filed 2012·Granted Jul 28, 2020·2 cites·19 claims
- 0741US2014264954A1Passivation and warpage correction by nitride film for molded wafersAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
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